NanoScience and Technology

Electrical Atomic Force Microscopy for Nanoelectronics

Editors: Celano, Umberto (Ed.)

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  • Comprehensive treatment of emerging devices, their operation and characterization
  • Authors provide a balance of industry and academic expertise
  • Includes images of state-of-the-art integrated devices 
  • Combines semiconductor physics and materials analysis
  • Provides an in depth collection of applied electrical AFM techniques
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eBook $119.00
price for USA (gross)
  • ISBN 978-3-030-15612-1
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  • Immediate eBook download after purchase
Hardcover $159.99
price for USA
  • ISBN 978-3-030-15611-4
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  • Usually dispatched within 3 to 5 business days.
About this book

The tremendous impact of electronic devices on our lives is the result of continuous improvements of the billions of nanoelectronic components inside integrated circuits (ICs). However, ultra-scaled semiconductor devices require nanometer control of the many parameters essential for their fabrication. Through the years, this created a strong alliance between microscopy techniques and IC manufacturing. This book reviews the latest progress in IC devices, with emphasis on the impact of electrical atomic force microscopy (AFM) techniques for their development. The operation principles of many techniques are introduced, and the associated metrology challenges described. Blending the expertise of industrial specialists and academic researchers, the chapters are dedicated to various AFM methods and their impact on the development of emerging nanoelectronic devices. The goal is to introduce the major electrical AFM methods, following the journey that has seen our lives changed by the advent of ubiquitous nanoelectronics devices, and has extended our capability to sense matter on a scale previously inaccessible.


About the authors

Umberto Celano is a senior research scientist at imec (Belgium), where his interests encompass solid-state physics and materials science for application in nanoelectronics and emerging devices. In this area, he conducted research at the border between engineering and fundamental science in various institutions such as KU Leuven, Osaka University, and Stanford University. He received his Ph.D. in Physics from the University of Leuven in 2015. Previously, Umberto obtained a B.Eng. in Electronic Engineering and an M.Sc. degree in Nanoelectronics from the University of Rome Sapienza, Italy.


Table of contents (12 chapters)

Table of contents (12 chapters)
  • The Atomic Force Microscopy for Nanoelectronics

    Pages 1-28

    Celano, Umberto

  • Conductive AFM for Nanoscale Analysis of High-k Dielectric Metal Oxides

    Pages 29-70

    Rodenbücher, Christian (et al.)

  • Mapping Conductance and Carrier Distributions in Confined Three-Dimensional Transistor Structures

    Pages 71-106

    Schulze, Andreas (et al.)

  • Scanning Capacitance Microscopy for Two-Dimensional Carrier Profiling of Semiconductor Devices

    Pages 107-142

    Mody, Jay (et al.)

  • Oxidation and Thermal Scanning Probe Lithography for High-Resolution Nanopatterning and Nanodevices

    Pages 143-172

    Ryu, Yu Kyoung (et al.)

Buy this book

eBook $119.00
price for USA (gross)
  • ISBN 978-3-030-15612-1
  • Digitally watermarked, DRM-free
  • Included format: EPUB, PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Hardcover $159.99
price for USA
  • ISBN 978-3-030-15611-4
  • Free shipping for individuals worldwide
  • Usually dispatched within 3 to 5 business days.

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Bibliographic Information

Bibliographic Information
Book Title
Electrical Atomic Force Microscopy for Nanoelectronics
Editors
  • Umberto Celano
Series Title
NanoScience and Technology
Copyright
2019
Publisher
Springer International Publishing
Copyright Holder
Springer Nature Switzerland AG
eBook ISBN
978-3-030-15612-1
DOI
10.1007/978-3-030-15612-1
Hardcover ISBN
978-3-030-15611-4
Series ISSN
1434-4904
Edition Number
1
Number of Pages
XX, 408
Number of Illustrations
26 b/w illustrations, 230 illustrations in colour
Topics