Read While You Wait - Get immediate ebook access, if available*, when you order a print book

IPA-IAO - Forschung und Praxis

Werkstückbegleitender Informationsspeicher als Basis für ein informationstechnisches Konzept für Halbleiterfertigungen

Authors: Sauter, Klaus-Dieter

Free Preview

Buy this book

eBook $54.99
price for USA
  • ISBN 978-3-642-47941-0
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $69.99
price for USA
  • ISBN 978-3-540-53236-1
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.

Table of contents (10 chapters)

Table of contents (10 chapters)

Buy this book

eBook $54.99
price for USA
  • ISBN 978-3-642-47941-0
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $69.99
price for USA
  • ISBN 978-3-540-53236-1
  • Free shipping for individuals worldwide
  • Immediate ebook access, if available*, with your print order
  • Usually dispatched within 3 to 5 business days.

Services for this book

Loading...

Bibliographic Information

Bibliographic Information
Book Title
Werkstückbegleitender Informationsspeicher als Basis für ein informationstechnisches Konzept für Halbleiterfertigungen
Authors
Series Title
IPA-IAO - Forschung und Praxis
Series Volume
149
Copyright
1990
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag, Berlin, Heidelberg
eBook ISBN
978-3-642-47941-0
DOI
10.1007/978-3-642-47941-0
Softcover ISBN
978-3-540-53236-1
Edition Number
1
Number of Pages
118
Topics

*immediately available upon purchase as print book shipments may be delayed due to the COVID-19 crisis. ebook access is temporary and does not include ownership of the ebook. Only valid for books with an ebook version. Springer Reference Works and instructor copies are not included.