55% off any Apress title—your Summer Sale giveaway!

IPA-IAO - Forschung und Praxis

Entwicklung und Optimierung von Prozeßkomponenten zur ionenunterstützten Abscheidung bei PVD-Verfahren

Authors: Olbrich, Walter

Free Preview

Buy this book

eBook $49.99
price for USA
  • ISBN 978-3-642-47892-5
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $89.99
price for USA
  • ISBN 978-3-540-58511-4
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Covid-19 shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock

Table of contents (12 chapters)

Table of contents (12 chapters)

Buy this book

eBook $49.99
price for USA
  • ISBN 978-3-642-47892-5
  • Digitally watermarked, DRM-free
  • Included format: PDF
  • ebooks can be used on all reading devices
  • Immediate eBook download after purchase
Softcover $89.99
price for USA
  • ISBN 978-3-540-58511-4
  • Free shipping for individuals worldwide
  • Institutional customers should get in touch with their account manager
  • Covid-19 shipping restrictions
  • Usually ready to be dispatched within 3 to 5 business days, if in stock

Services for this book

Loading...

Bibliographic Information

Bibliographic Information
Book Title
Entwicklung und Optimierung von Prozeßkomponenten zur ionenunterstützten Abscheidung bei PVD-Verfahren
Authors
Series Title
IPA-IAO - Forschung und Praxis
Series Volume
202
Copyright
1994
Publisher
Springer-Verlag Berlin Heidelberg
Copyright Holder
Springer-Verlag, Berlin, Heidelberg
eBook ISBN
978-3-642-47892-5
DOI
10.1007/978-3-642-47892-5
Softcover ISBN
978-3-540-58511-4
Edition Number
1
Number of Pages
126
Topics