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  • © 1996

Technologie hochintegrierter Schaltungen

Part of the book series: Halbleiter-Elektronik (HALBLEITER, volume 19)

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Table of contents (8 chapters)

  1. Front Matter

    Pages I-XX
  2. Einleitung

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 1-2
  3. Grundzüge der Technologie von Integrierten Schaltungen

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 3-12
  4. Schichttechnik

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 13-100
  5. Lithographie

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 101-180
  6. Ätztechnik

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 181-222
  7. Dotiertechnik

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 223-252
  8. Reinigungstechnik

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 253-267
  9. Prozeßintegration

    • Dietrich Widmann, Hermann Mader, Hans Friedrich
    Pages 269-349
  10. Back Matter

    Pages 351-366

Authors and Affiliations

  • Bereich Halbleiter, Siemens AG, München/Berlin, Germany

    Dietrich Widmann

  • Fachbereich Elektrotechnik der Fachhochschule München, Vorstand im Institut für Technologie- und Wissenstransfer an der FH München, Germany

    Hermann Mader

  • TELA Beteiligungsgesellschaft m.b.H., München, Germany

    Hans Friedrich

Bibliographic Information

Buy it now

Buying options

eBook USD 89.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book USD 119.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Other ways to access