Editors:
- Covers the major developments in laser-assisted materials processing
- Includes theory, design of laser technologies, applications to inorganic as well as biological materials and to microtechnology
- Most comprehensive scientific monograph with the widest scope
- A must for all researchers in applied laser technology
- Graduate students will also benefit from this systematically written book
- Includes supplementary material: sn.pub/extras
Part of the book series: Springer Series in Materials Science (SSMATERIALS, volume 135)
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Table of contents (13 chapters)
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Front Matter
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Back Matter
About this book
Editors and Affiliations
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Inst. of Phys.a.Chemical Res., Laser Technology Laboratory, RIKEN, Wako-shi, Saitama, Japan
Koji Sugioka
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Department of Engineering Physics, Laser Processing Laboratory, École Polytechnique Montréal, Montreal, Canada
Michel Meunier
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Naval Research Laboratory, Washington, USA
Alberto Piqué
About the editors
Bibliographic Information
Book Title: Laser Precision Microfabrication
Editors: Koji Sugioka, Michel Meunier, Alberto Piqué
Series Title: Springer Series in Materials Science
DOI: https://doi.org/10.1007/978-3-642-10523-4
Publisher: Springer Berlin, Heidelberg
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2010
Hardcover ISBN: 978-3-642-10522-7Published: 03 September 2010
Softcover ISBN: 978-3-642-26473-3Published: 07 November 2012
eBook ISBN: 978-3-642-10523-4Published: 13 August 2010
Series ISSN: 0933-033X
Series E-ISSN: 2196-2812
Edition Number: 1
Number of Pages: XVI, 344
Number of Illustrations: 130 b/w illustrations, 27 illustrations in colour
Topics: Optics, Lasers, Photonics, Optical Devices, Nanotechnology