Overview
- Selected as an outstanding contribution by K.U. Leuven
- Reports significant advances in non-destructive testing of semiconductors
- New approaches have potential for industrial application
- Includes supplementary material: sn.pub/extras
Part of the book series: Springer Theses (Springer Theses)
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Table of contents (8 chapters)
Keywords
About this book
Authors and Affiliations
Bibliographic Information
Book Title: Photomodulated Optical Reflectance
Book Subtitle: A Fundamental Study Aimed at Non-Destructive Carrier Profiling in Silicon
Authors: Janusz Bogdanowicz
Series Title: Springer Theses
DOI: https://doi.org/10.1007/978-3-642-30108-7
Publisher: Springer Berlin, Heidelberg
eBook Packages: Physics and Astronomy, Physics and Astronomy (R0)
Copyright Information: Springer-Verlag Berlin Heidelberg 2012
Hardcover ISBN: 978-3-642-30107-0Published: 28 June 2012
Softcover ISBN: 978-3-642-42686-5Published: 17 July 2014
eBook ISBN: 978-3-642-30108-7Published: 26 June 2012
Series ISSN: 2190-5053
Series E-ISSN: 2190-5061
Edition Number: 1
Number of Pages: XXIV, 204