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Table of contents (8 chapters)
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Front Matter
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Back Matter
Authors and Affiliations
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Institut für Festkörperphysik, Technischen Universität Graz, Österreich
René A. Haefer
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Konzerngruppe Physikalische Grundlagen, Gebrüder Sulzer AG, Winterthur, Schweiz
René A. Haefer
Bibliographic Information
Book Title: Oberflächen- und Dünnschicht-Technologie
Book Subtitle: Teil II: Oberflächenmodifikation durch Teilchen und Quanten
Authors: René A. Haefer
Series Title: WFT Werkstoff-Forschung und -Technik
DOI: https://doi.org/10.1007/978-3-642-87679-0
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin, Heidelberg 1991
Softcover ISBN: 978-3-540-53012-1Published: 28 June 1991
eBook ISBN: 978-3-642-87679-0Published: 09 March 2013
Series ISSN: 0940-7804
Edition Number: 1
Number of Pages: XV, 286
Number of Illustrations: 58 b/w illustrations
Topics: Characterization and Evaluation of Materials, Surfaces and Interfaces, Thin Films, Manufacturing, Machines, Tools, Processes