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Emerging Technologies for In Situ Processing

  • Book
  • © 1988

Overview

Editors:
  1. Daniel J. Ehrlich

    1. Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, USA

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    You can also search for this editor in PubMed   Google Scholar

  2. Van Tran Nguyen

    1. Physics and Technologies Research Division, CNET-Grenoble, France

    View editor publications

    You can also search for this editor in PubMed   Google Scholar

Part of the book series: NATO Science Series E: (NSSE, volume 139)

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Table of contents (30 chapters)

  1. Front Matter

    Pages i-x
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  2. In-Situ Processing Combining MBE, Lithography and Ion Implantation

    • H. Ahmed
    Pages 1-11

  3. Motivations and Early Demonstrations for In-Situ Processings for III — V Semiconductor Devices

    • Izuo Hayashi
    Pages 13-21

  4. Laser Etching and Microelectronic Applications

    • John J. Ritsko
    Pages 23-31

  5. Laser-Induced Chemical Processing of Materials

    • D. Bauerle, T. Szorenyi, G. Q. Zhang, K. Piglmayer, M. Eyett, R. Kullmer
    Pages 33-43

  6. High Technology Manufacturing: Critical Issues for the Future

    • E. L. Hu
    Pages 45-54

  7. Ultra High Vacuum Processing: MBE

    • J. P. Harbison, P. F. Liao, D. M. Hwang, E. Kapon, M. C. Tamargo, G. E. Derkits Jr et al.
    Pages 55-60

  8. Epitaxial Growth of III-V Materials on Implanted III-V Substrates

    • P. N. Favennec, H. L’Haridon, M. Salvi, L. Henry, A. Le Corre, D. Lecrosnier et al.
    Pages 61-70

  9. Mechanisms of Laser-Induced Deposition from the Gas Phase

    • R. L. Jackson, T. T. Kodas, G. W. Tyndall, T. H. Baum, P. B. Comita
    Pages 71-81

  10. Time Resolved Measurements in the Thermally Assisted Photolytic Laser Chemical Vapor Deposition Of Platinum

    • D. Braichotte, H. Van Den Bergh
    Pages 83-91

  11. Excimer Laser Projection Patterning

    • M. Rothschild, D. J. Ehrlich
    Pages 93-104

  12. Excimer Laser Patterning And Etching Of Metals

    • P. H. Key, P. E. Dyer, R. D. Greenough
    Pages 105-112

  13. Ion Projection Lithography

    • Gerhard Stengl, Hans Loschner, Ernst Hammel, Edward D. Wolf, Julius J. Muray
    Pages 113-120

  14. UV Light-Assisted Deposition of Al on Si from TMA

    • J. E. Bouree, J. Flicstein
    Pages 121-129

  15. E-Beam Induced Decomposition of Inorganic Solids

    • Mino Green, Constantine Aidinis, Olasebikan Fakolujo
    Pages 131-136

  16. Electronic Connection Through Silicon Wafers

    • T. Dupeux, P. Deroux-Dauphin, G. Nicolas, D. Leti
    Pages 137-143

  17. The Development and use of Novel Precursors for Photolytic Deposition of Dielectric Films

    • C. J. Brierley, F. W. Ainger, C. Trondle
    Pages 145-152

  18. Focused Ion Beam Induced Deposition

    • J. Melngailis, A. D. Dubner, J. S. Ro, G. M. Shedd, H. Lezec, C. V. Thompson
    Pages 153-161

  19. Laser-Induced Metal Deposition for Clear Defect Repair Work on X-Ray Masks

    • R. Putzar, H.-C. Petzold, U. Weigmann
    Pages 163-169

  20. Confirmation of the Wavelength Dependence of Silicon Oxidation Induced by Visible Radiation

    • Ian W. Boyd, F. Micheli
    Pages 171-178
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Keywords

Editors and Affiliations

  • Lincoln Laboratory, Massachusetts Institute of Technology, Lexington, USA

    Daniel J. Ehrlich

  • Physics and Technologies Research Division, CNET-Grenoble, France

    Van Tran Nguyen

Bibliographic Information

  • Book Title: Emerging Technologies for In Situ Processing

  • Editors: Daniel J. Ehrlich, Van Tran Nguyen

  • Series Title: NATO Science Series E:

  • DOI: https://doi.org/10.1007/978-94-009-1409-4

  • Publisher: Springer Dordrecht

  • eBook Packages: Springer Book Archive

  • Copyright Information: Martinus Nijhoff Publishers, Dordretch. 1988

  • Hardcover ISBN: 978-90-247-3733-8Due: 31 July 1988

  • Softcover ISBN: 978-94-010-7130-7Published: 26 September 2011

  • eBook ISBN: 978-94-009-1409-4Published: 06 December 2012

  • Series ISSN: 0168-132X

  • Edition Number: 1

  • Number of Pages: 304

  • Topics: Characterization and Evaluation of Materials, Electrical Engineering

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