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Keywords
Table of contents (123 papers)
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Materials
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Materials for Packaging and Passivation
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Integrated Optics Materials and Technologies
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Technologies
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Pattern Generation and Image Transfer
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Laser Supported Deposition
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Reactive Etching and Deposition
Editors and Affiliations
Bibliographic Information
Book Title: Micro System Technologies 90
Book Subtitle: 1st International Conference on Micro Electro, Opto, Mechanic Systems and Components Berlin, 10–13 September 1990
Editors: Herbert Reichl
DOI: https://doi.org/10.1007/978-3-642-45678-7
Publisher: Springer Berlin, Heidelberg
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eBook Packages: Springer Book Archive
Copyright Information: Springer-Verlag Berlin Heidelberg 1990
Softcover ISBN: 978-3-642-45680-0Published: 04 December 2014
eBook ISBN: 978-3-642-45678-7Published: 06 December 2012
Edition Number: 1
Number of Pages: XV, 858
Topics: Electronics and Microelectronics, Instrumentation, Optics, Lasers, Photonics, Optical Devices, Engineering, general